Secondary Ion Mass Spectrometry

SIMS is a technique used in materials and surface science to analyze the composition of sold surfaces and thin films by sputtering the surface of specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions

These secondary ions are measured with a mass spectrometer to determine the elemental, isotopic, or molecular composition of the surface

Sims is the most sensitive surface analysis technique, being able to detect elements present in parts per billion range



Sensitiveness: ppm to ppb

Depth Resolution: a few nanometers

Elements: Hydrogen to Uranium

Lateral Resolution: Less than 200 nm