HFCVD

 HFCVD

The HFCVD is an important process for fabricating nanostructures such as microelectronic circuits. A wide variety of semiconductors, diamond like carbon (DLC), diamond nanocrystals and nanotubes can be made using this process, and large degree of control can be exerted over the deposition by altering the composition and concentration of active species in the gas phase.