Nanolayer and Thin film fabrication has potential application in device fabrication. Solar cells are important area of research in recent years.
To compete with dominant silicon solar cells, production of low cost Thin film solar cell is the key.
Production of high quality conductive transparent layers and controlled p-type and n-type layers is a major challenge.
• Target diameter: 3 in;
• 60 lr Vacuum Chamber;
• Base Pressure 2×10-6;• DC and RF Magnetron Sputtering